We provide molds for nanoimprint using lithography and Ni electroforming technology. Aligner, stepper, laser direct drawing, electron beam drawing and exposure apparatus can be selected according to pattern accuracy.
- Fine mold by Ni electroforming.
- We can provide fine molds of 50nm or less such as holes, pillars, line patterns.
Quartz mold can be provided for UV imprint.
UV imprint / thermal imprint / molding can be commissioned processing.
- Imprint / molding is possible to imprint material (resin, resist etc.) according to your request.
- Please utilize us whether to introduce nanoimprint technology, evaluation before introduction of equipment, basic experiment of nanoimprint technology or initial examination.
Example of UV imprint <<used resist : PAK-01>>
Please also see the page “About nanoimprint” explained about nanoimprint.