Nanoimprint

We provide molds for nanoimprint using lithography and Ni electroforming technology. Aligner, stepper, laser direct drawing, electron beam drawing and exposure apparatus can be selected according to pattern accuracy.

Ni mold

  • Fine mold by Ni electroforming.
  • We can provide fine molds of 50nm or less such as holes, pillars, line patterns.

 


Quartz mold

  • Quartz mold can be provided for UV imprint.


Imprint・Molding

UV imprint / thermal imprint / molding can be commissioned processing.

  • Imprint / molding is possible to imprint material (resin, resist etc.) according to your request.
  • Please utilize us whether to introduce nanoimprint technology, evaluation before introduction of equipment, basic experiment of nanoimprint technology or initial examination.

Example of UV imprint <<used resist : PAK-01>>


60nm L/S=1:2
60nm L/S=1:2
60nm L/S=1:5
60nm L/S=1:5
70nm L/S=1:5
70nm L/S=1:5

Please also see the page “About nanoimprint” explained about nanoimprint.